Thanks shunty for the help. I looked at the logs and it said "Failed to connect to mod-mono-server after several attempts to spawn the process."
I changed the MonoServerPath to point to the example in shunty's comment, and changed the paths found in that file to correct ones.
Then I followed the instructions here: http://www.vbforums.com/showthread.php?524548-RESOLVED-mod_mono-with-apache
I still have problems, but at least they aren't related to server configuration anymore. Thanks!