To get the last six lines tail will be faster, since it works backwards and only loads what you ask for (rather than reading in the whole file then looping through it). It'll obviously also use less memory, no matter the file size.
<cfexecute
name = "tail"
arguments = "--lines=6 #Filename#"
timeout = 30
variable = "LastSixLines"
/>
<cfset Data = {} />
<cfloop index="CurLine" array=#LastSixLines.trim().split('\n')# >
<cfset Data[ListFirst(CurLine,'=')] = ListRest(CurLine,'=') />
</cfloop>
As you appear to be on Windows, you likely need to install tail (it's pre-installed for Linux and MacOS). The simplest option to get it would be MSYS, which you may already have depending on what other software you use - for example, Git for Windows uses MSYS, and has tail.exe in its bin folder.
In that case, the second line above changes to something like:
name = "C:/Program Files/Git/bin/tail"
If you need the code to work on multiple systems, you can make that part a variable, (or put the appropriate directory onto the system PATH so it can be called from anywhere).