According to mitchellh
Can you start the machine manually (from the GUI)? This error message is usually indicative of VirtualBox issues.
my solution
I use vagrant under windows though, I solved this problem by simply kill all the VirtualBox process, and restart VirtualBox GUI, start the VM, then normally power off it.
maybe useful links
These two issues may help.
https://github.com/mitchellh/vagrant/issues/2157
https://github.com/mitchellh/vagrant/issues/2187 may also be helpful.